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About UsREGEN Co., Ltd. is rapidly changing our
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big data, and autonomous driving. - Products
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lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Recruitment
RecruitmentREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Customer Support
Customer SupportREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving.
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PRODUCT
Product Description
Introducing the products of REGEN Co., Ltd.
PRODUCT 04
PS Section Heat Pipe
Product Description
The REGEN PSEHP-Series PSEHP Heating Pipe is a high-temperature heating
solution between the pump and scrubber in the semiconductor process, and is a product that
overcomes the safety and structural issues exposed in the existing heat bellows system.
In a situation where increasingly higher temperatures are required due to changes
in future processes and gas amounts, this product was created to overcome not only
the temperature inside the inner pipe, but also the temperature and sealing of the
pipe connection area, which had been vulnerable to temperature.
HPS, Heat piping and PS piping application process
| Process | Detailed process | GAS used | Powder | Temperature |
|---|---|---|---|---|
| CVD | PE-SiN | NH3, N2O, SiH4, TEOS | SiO2, Si(NH2)x | 150~200 |
| Ti-TiN | NH3, TiCL4 | Ti(NH2)Cl | 180~240 | |
| DIFF | ALD SiN | DCS, NH3, F2, N2O | NH4Cl(SiNH2)xCl, SiO2 | 180~200 |
| SiN | NH3, N2O, SiH4, DCS, SiCL4 | NH4Cl(SiNH2)xCl, SiO2 | 180~200 | |
| ETCH | METAL ETCH | BCl3, CHF3, Cl2, HCl, CH4, CF4등 | B2O3, SiO2, SiF4 | 150~180 |
| METAL | WN | WF6, NH3 | NH4F(?) | 180~200 |