
- ADDRESS
- (17556) 55-21,Saeteo 1-gil, Wongok-myeon, Anseong-si, Gyeonggi-do
- TEL
- +82-31-651-0940
REGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving.
REGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving.
REGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving.
REGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving.
Introducing the products of REGEN Co., Ltd.
The REGEN PSEHP-Series PSEHP Heating Pipe is a high-temperature heating
solution between the pump and scrubber in the semiconductor process, and is a product that
overcomes the safety and structural issues exposed in the existing heat bellows system.
In a situation where increasingly higher temperatures are required due to changes
in future processes and gas amounts, this product was created to overcome not only
the temperature inside the inner pipe, but also the temperature and sealing of the
pipe connection area, which had been vulnerable to temperature.
Process | Detailed process | GAS used | Powder | Temperature |
---|---|---|---|---|
CVD | PE-SiN | NH3, N2O, SiH4, TEOS | SiO2, Si(NH2)x | 150~200 |
Ti-TiN | NH3, TiCL4 | Ti(NH2)Cl | 180~240 | |
DIFF | ALD SiN | DCS, NH3, F2, N2O | NH4Cl(SiNH2)xCl, SiO2 | 180~200 |
SiN | NH3, N2O, SiH4, DCS, SiCL4 | NH4Cl(SiNH2)xCl, SiO2 | 180~200 | |
ETCH | METAL ETCH | BCl3, CHF3, Cl2, HCl, CH4, CF4등 | B2O3, SiO2, SiF4 | 150~180 |
METAL | WN | WF6, NH3 | NH4F(?) | 180~200 |
(17556) 55-21,Saeteo 1-gil, Wongok-myeon, Anseong-si, Gyeonggi-do
Representative: Jihyeon Son
Business registration number: 641-86-00770
TEL : +82-31-651-0940
FAX : +82-31-611-0940
E-mail : sltechson@naver.com
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