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REGEN Co., Ltd. is at the center of future changes and dreams

PRODUCT

Product Description

Introducing the products of REGEN Co., Ltd.

PRODUCT 03

Ultra-high Temperature Heat Pipe

Product Description

The REGEN SEHP-Series SEHP Heating Pipe is an ultra-high-temperature heat solution developed
to address the increasing gas usage, changes in gas types, process refinement, larger wafer sizes,
shortened process times, and increased load on the pumping and exhaust system in semiconductor
processes, responding to the growing demand for higher temperatures in the future.

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