- ADDRESS
- (17556) 55-21,Saeteo 1-gil, Wongok-myeon, Anseong-si, Gyeonggi-do
- TEL
- +82-31-651-0940
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- About Us
About UsREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Products
ProductsREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Recruitment
RecruitmentREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Customer Support
Customer SupportREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving.
REGEN Co., Ltd. is at the center of future changes and dreams
PRODUCT
Product Description
Introducing the products of REGEN Co., Ltd.
PRODUCT 01
HPS
Product Description
The REGEN RPB-Series Pipe Kit to prevent pressure transmitter port blockage is a specialized product to prevent blockage of the PT Sensor Port that occurs in the hashing processing (ALD-TiN, Ti-TiN, SiN, PE-SiN, ALD-SiN, W/N, M/E, etc.) during semiconductor processing. It applies a new concept of heating method that maintains the actual temperature in the pipe at 200℃ and even the pipe flange edge at 200℃, and prevents power stacking by maintaining the entire sensor port and sensor line at 200℃.
In addition, it blocks reaction with even trace amounts of oxygen by supplying a very small amount of Hot N2 to even the oxygen hidden in the dead space of the sensor port line.
