- ADDRESS
- (17556) 55-21,Saeteo 1-gil, Wongok-myeon, Anseong-si, Gyeonggi-do
- TEL
- +82-31-651-0940
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- About Us
About UsREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Products
ProductsREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Recruitment
RecruitmentREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving. - Customer Support
Customer SupportREGEN Co., Ltd. is rapidly changing our
lives in all aspects, including artificial intelligence,
big data, and autonomous driving.
REGEN Co., Ltd. is at the center of future changes and dreams
PRODUCT
Product Description
Introducing the products of REGEN Co., Ltd.
PRODUCT 02
High Temperature Heat Pipe
Product Description
The REGEN EHP-Series EF Heating Pipe is a specialized system designed to clear the power
generated due to inadequate temperature in the connection flange part of the utility piping
(pump and scrubber section, scrubber inlet area) with the hashing process
(ALD-TiN, Ti-TiN, SiN, PE-SiN, ALD-SiN, W/N, M/E, etc.) during semiconductor processing.
It is a new paradigm heating system that has never been realized before, maintaining
the pipe at 200℃ and even the pipe flange edge at 200℃.
Additionally, the actual temperature of the inner wall of the pipe has been
realized beyond 200°C, reaching 250°C and 300°C.
